LAM 715-011126-001 BRACKET ENCODER

LAM 715-011213-001 PLATE, VENT PORT 90DEG LOADLOCK

LAM 715-011214-001 PLATE VENT PORT 180DEG

LAM 715-011229-003 PLATE, SEAL, EXIT LOADLOCK

LAM 715-011420-001 PLATE

LAM 715-011492-005 HOLDER WAFER 5"

LAM 715-011502-001 COOLING RING

早些時(shí)候，沒有PLC或者PLC價(jià)格比較昂貴的時(shí)候，邏輯控制基本上是使用繼電器和接觸器來完成的。繼電器或者接觸器就是一個線圈加幾路常開或者常閉觸點(diǎn)，利用線圈和觸點(diǎn)之間的自保和互鎖來組合各種復(fù)雜的工業(yè)控制邏輯，比如機(jī)床控制，要啟動電機(jī)正反轉(zhuǎn)，要實(shí)現(xiàn)各個軸之間互相配合，要開啟冷些液體循環(huán)泵，要讓驅(qū)動器啟停，都要用大量的繼電器。邏輯分為組合邏輯和時(shí)序邏輯，繼電器實(shí)現(xiàn)組合邏輯容易，但是實(shí)現(xiàn)時(shí)序邏輯就有點(diǎn)困難了，畢竟時(shí)間繼電器是比較粗糙的。

LAM 715-011504-001 BAFFLE, UPPER

LAM 715-011521-001 BRACKET POU GAS FILTER

LAM 715-011531-009 ELECTRODE, ANODIZED

LAM 715-011531-011 ELECTRODE, ALUMINUM, ANODIZED

LAM 715-011531-014 ELECTRODE, AL, UPPER

LAM 715-011531-014 ELECTRODE, AL, UPPER

LAM 715-011531-016 UPPER ELECTRODE

LAM 715-011531-102 ELECTRODE, UPPER, ANOD

LAM 715-011532-006 (R)PLATE UPPER SEAL

LAM 715-011559-262 WAFER CLAMP

LAM 715-011565-001 BOLT, CLAMP RETAINING

LAM 715-011565-003 BOLT

LAM 715-011570-001 SHIELD

LAM 715-011582-001 BAFFLE PLATE, LOWER AL

LAM 715-011590-001 PLATE,LOWER BAFFLE 6

LAM 715-011593-002 PLATE,SEAL,4420

LAM 715-011597-001 5MIL ELECTRODE AL AN

LAM 715-011613-002 BAR, STOP

LAM 715-011626-001 RING, COOLING LOWER ELECTRODE

LAM 715-011630-001 ELECTRODE , BOTTOM

LAM 715-011630-001 ELECTRODE , BOTTOM

LAM 715-011639-008 CAP, ELECTRODE, LOWER, 4400

LAM 715-011639-508 CAP, LWR, ROUGH, 858STR

LAM 715-011640-006 RING, AL-ANDZ LWR FOCUS ELCTD

LAM 715-011664-006 ELCTRD, LWR CAP, 6-IN NO ANDZ FLAT AL

LAM 715-011665-006 ANODE

LAM 715-011669-006 ELCTRD, LWR DOMED W/OUT PINS, AL

LAM 715-011746-142 PLATE, 4" .010 DOME REDUCED HGT

LAM 715-011823-001 ROD-MECHANICAL STOP 8.50

LAM 715-011825-001 LOWER CHAMBER PLATE

LAM 715-011858-001 PLATE WINDOW END POINT DET

LAM 715-011902-001 BAFFLE PLATE

PLC是通過執(zhí)行程序?qū)崿F(xiàn)控制的。當(dāng)控制要求發(fā)生改變時(shí)，只要修改程序即可，*大限度地縮短了工藝更新所需要的時(shí)間。PLC的產(chǎn)品已標(biāo)準(zhǔn)化、系列化、模塊化，而且PLC及配套產(chǎn)品的模塊品種多，用戶可以靈活方便地進(jìn)行系統(tǒng)配置組合成各種不同規(guī)模、不同功能的控制系統(tǒng)。在PLC控制系統(tǒng)中，只需在PLC的端子上接入相應(yīng)的輸入/輸出信號線即可，不需要進(jìn)行大量且復(fù)雜的硬接線，并且PLC有較強(qiáng)的帶負(fù)載能力，可以直接驅(qū)動一般的電磁閥和交流接觸器。

LAM 715-011909-501 ELECTRODE, SI, CAPTIVE

LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858

LAM 715-011912-555 BAFFLE, UPPER, 4420, STR,858

LAM 715-011913-083 PLATE, BAFFLE LOWER

LAM 715-011913-083 PLATE, BAFFLE LOWER

LAM 715-011913-501 BAFFLE, LOWER

LAM 715-011913-555 BAFFLE, LOWER, 4420,STR,858

LAM 715-012025-001 SPACER 0-RING

LAM 715-012101-008 HOLDER,W/F 8",ARM EXIT

LAM 715-012111-002 COVER ARM HSG (CABLE DRIVE)

LAM 715-012126-001 TUBE ARM DRIVE

LAM 715-012165-005 5"HOLDER WAFER 5" TIGHT POC

LAM 715-012165-008 ARM, TIGHT POCKET ELL

LAM 715-012223-001 SHAFT GROVVED INNER PLATE

LAM 715-012233-002 GATE-HARD ANODIZE INNER

LAM 715-012243-001 BLOCK LATCH

LAM 715-012245-001 PIVOT, GATE, INNER

LAM 715-012251-001 BAR LATCH SOLENOID RELEASE

LAM 715-012254-001 BEARING, LATCH SOLENOID RELEASE

LAM 715-012322-001 OUTER DOOR FOR GATE DRIVE

LAM 715-013295-001 HSG,ADJ, WFR LIFT

LAM 715-013477-001 PLATE, MOUNTING

LAM 715-013718-006 CHUCK SPINNER 6"

LAM 715-013718-016 ASSY ELECTRODE

LAM 715-013772-001 COLLAR PINNED LIFTER 6"(462

LAM 715-014074-002 BLOCK MTG , GAS NOZZLE

LAM 715-014556-031 GASKET,ORIFICE

LAM 715-015092-001 BLOCK,THREADED,SEED

LAM 715-015216-001 TUBE ADAPTER

LAM 715-0166-001 CYLINDER, ARM-AIR

LAM 715-018611-117 CAP, LWR, ELECTRODE, 8"

LAM 715-018906-002 ELECTRODE, BOTTOM, BELLOW

LAM 715-018917-001 HOLDER,W/F CLAMP(462

LAM 715-018991-006 ELECTRODE, ALUMINUM, ANODIZED

LAM 715-019939-002 TUBE,MANF TO MCRWV SOURCE

LAM 715-019940-002 TUBE,MANF FROM MCRWV SOURCE

LAM 715-019942-002 TUBE,MANF TO MCRWV VLVE FROM G

LAM 715-019943-001 TUBE,MANF TO TEE FROM CHMBR

LAM 715-019944-004 TUBE,VLV TO TEE TO CHMBR

LAM 715-019945-002 TUBE,VLV TO CHMBR

LAM 715-021092-001 SPACER

LAM 715-021274-008 CAP, LOWER ELECTRODE 8IN

LAM 715-021400-002 COVER, 180 DEG LOADLOCK, P.S. MOD

LAM 715-021507-1 CONNECTOR,MALE,VCR,MOD.

LAM 715-021719-001 COVER BELL JAR ISO ETCH

LAM 715-024347-100 PLATE,SPRT,V65,V65A,V75,V75A

LAM 715-025106-001 PLATE- LOWER BAFFLE, ESC

LAM 715-028087-005 SHROUD HARD ANODIZED

LAM 715-028420-001 CAP, L ELECTRODE FLAT PROCESS

LAM 715-028486-001 PLATE UPPER SEAL 6' ELECTRODE

LAM 715-028559-001 SHOWER HEAD 6" 4620

LAM 715-028616-001 PLATE LOWER BAFFLE 8" BOLTED

LAM 715-028620-001 PROBE, THERMAL WELL

LAM 715-028735-001 TRIPPLE BAFFLE, UPPER 852

LAM 715-028852-001 RING,CLAMP UPPER